Nanoscale Wear Layers on Silicon Wafers Induced by Mechanical Chemical Grinding

标题
Nanoscale Wear Layers on Silicon Wafers Induced by Mechanical Chemical Grinding
作者
关键词
Silicon, Nanoscale, Wear, Transmission electron microscopy, Grinding
出版物
TRIBOLOGY LETTERS
Volume 65, Issue 4, Pages -
出版商
Springer Nature
发表日期
2017-09-02
DOI
10.1007/s11249-017-0911-z

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