标题
Nanoscale Wear Layers on Silicon Wafers Induced by Mechanical Chemical Grinding
作者
关键词
Silicon, Nanoscale, Wear, Transmission electron microscopy, Grinding
出版物
TRIBOLOGY LETTERS
Volume 65, Issue 4, Pages -
出版商
Springer Nature
发表日期
2017-09-02
DOI
10.1007/s11249-017-0911-z
参考文献
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