Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

标题
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 289, Issue -, Pages 529-532
出版商
Elsevier BV
发表日期
2013-11-21
DOI
10.1016/j.apsusc.2013.11.030

向作者/读者发起求助以获取更多资源

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started