Nanometric cutting of single crystal silicon surfaces modified by ion implantation

标题
Nanometric cutting of single crystal silicon surfaces modified by ion implantation
作者
关键词
-
出版物
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 60, Issue 1, Pages 527-530
出版商
Elsevier BV
发表日期
2011-04-19
DOI
10.1016/j.cirp.2011.03.057

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