Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics

标题
Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 25, Issue 1, Pages 27-33
出版商
American Chemical Society (ACS)
发表日期
2012-12-05
DOI
10.1021/cm302610z

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