Eliminating the Trade-Off between the Throughput and Pattern Quality of Sub-15 nm Directed Self-Assembly via Warm Solvent Annealing
出版年份 2014 全文链接
标题
Eliminating the Trade-Off between the Throughput and Pattern Quality of Sub-15 nm Directed Self-Assembly via Warm Solvent Annealing
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 25, Issue 2, Pages 306-315
出版商
Wiley
发表日期
2014-11-19
DOI
10.1002/adfm.201401529
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