Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement

标题
Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement
作者
关键词
-
出版物
NANO LETTERS
Volume 9, Issue 6, Pages 2300-2305
出版商
American Chemical Society (ACS)
发表日期
2009-05-07
DOI
10.1021/nl9004833

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