Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3 and Ozone

标题
Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe)3 and Ozone
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 113, Issue 52, Pages 21825-21830
出版商
American Chemical Society (ACS)
发表日期
2009-11-05
DOI
10.1021/jp907940u

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