Competing Mechanisms in Atomic Layer Deposition of Er2O3versus La2O3from Cyclopentadienyl Precursors

标题
Competing Mechanisms in Atomic Layer Deposition of Er2O3versus La2O3from Cyclopentadienyl Precursors
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 22, Issue 1, Pages 117-129
出版商
American Chemical Society (ACS)
发表日期
2009-12-05
DOI
10.1021/cm902469c

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