Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

标题
Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting
作者
关键词
-
出版物
ACS Nano
Volume 3, Issue 8, Pages 2304-2310
出版商
American Chemical Society (ACS)
发表日期
2009-08-25
DOI
10.1021/nn9003633

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