Nanoimprint lithography: An old story in modern times? A review

标题
Nanoimprint lithography: An old story in modern times? A review
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 2, Pages 458
出版商
American Vacuum Society
发表日期
2008-04-18
DOI
10.1116/1.2890972

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