Inclined nanoimprinting lithography for 3D nanopatterning

标题
Inclined nanoimprinting lithography for 3D nanopatterning
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 22, Issue 22, Pages 225302
出版商
IOP Publishing
发表日期
2011-04-05
DOI
10.1088/0957-4484/22/22/225302

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