Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating

标题
Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 21, Issue 29, Pages 295303
出版商
IOP Publishing
发表日期
2010-07-06
DOI
10.1088/0957-4484/21/29/295303

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