Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching

标题
Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 13, Pages 133109
出版商
AIP Publishing
发表日期
2008-10-07
DOI
10.1063/1.2988893

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