Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

出版年份 2008 全文链接

标题

Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

作者

关键词

-

出版物

NANO LETTERS

Volume 8, Issue 11, Pages 3799-3802

出版商

American Chemical Society (ACS)

发表日期

2008-10-28

DOI

10.1021/nl802129f

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