Metal-assisted chemical etching of silicon in HF–H2O2

标题
Metal-assisted chemical etching of silicon in HF–H2O2
作者
关键词
-
出版物
ELECTROCHIMICA ACTA
Volume 53, Issue 17, Pages 5509-5516
出版商
Elsevier BV
发表日期
2008-04-13
DOI
10.1016/j.electacta.2008.03.009

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