Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

标题
Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 11, Pages 113517
出版商
AIP Publishing
发表日期
2009-06-06
DOI
10.1063/1.3132862

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