Reactive ionized physical vapor deposition of thin films

Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere

(2011) W P Leroy et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

STRUCTURE AND OPTICAL PROPERTIES OF HIGH-RATE LOW-TEMPERATURE GROWN TiO2 THIN FILMS BY REACTIVE MAGNETRON SPUTTERING

(2010) Zhuguo LI et al.   ACTA METALLURGICA SINICA

On the phase formation of sputtered hafnium oxide and oxynitride films

(2010) K. Sarakinos et al.   JOURNAL OF APPLIED PHYSICS

On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering

(2009) J Alami et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

(2009) K. Sarakinos et al.   SURFACE & COATINGS TECHNOLOGY

Ion composition produced by high power impulse magnetron sputtering discharges near the substrate

(2008) A. P. Ehiasarian et al.   JOURNAL OF APPLIED PHYSICS

Cross-field ion transport during high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY