On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering

Published 2009 View Full Article

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Title
On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 11, Pages 115204
Publisher
IOP Publishing
Online
2009-05-14
DOI
10.1088/0022-3727/42/11/115204

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