Improvement of electrical performance of InGaZnO/HfSiO TFTs with 248-nm excimer laser annealing
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Title
Improvement of electrical performance of InGaZnO/HfSiO TFTs with 248-nm excimer laser annealing
Authors
Keywords
InGaZnO, ELA, mobility
Journal
Electronic Materials Letters
Volume 10, Issue 5, Pages 899-902
Publisher
Springer Nature
Online
2014-09-05
DOI
10.1007/s13391-014-3327-z
References
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