Chemical Bonding States of Plasma Nitrided High-k/Ge Gate Stack

Published 2011 View Full Article

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Title
Chemical Bonding States of Plasma Nitrided High-k/Ge Gate Stack
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 14, Issue 4, Pages H167
Publisher
The Electrochemical Society
Online
2011-02-11
DOI
10.1149/1.3545937
References
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