Chemical Bonding States of Plasma Nitrided High-k/Ge Gate Stack

标题
Chemical Bonding States of Plasma Nitrided High-k/Ge Gate Stack
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 14, Issue 4, Pages H167
出版商
The Electrochemical Society
发表日期
2011-02-11
DOI
10.1149/1.3545937

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