The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 11, Issue 8, Pages H210

出版商

The Electrochemical Society

发表日期

2008-06-14

DOI

10.1149/1.2929064

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