Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy

标题
Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
作者
关键词
-
出版物
CRYSTAL GROWTH & DESIGN
Volume 13, Issue 4, Pages 1485-1490
出版商
American Chemical Society (ACS)
发表日期
2013-02-08
DOI
10.1021/cg3016172

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