Fabrication of high-aspect ratio silicon nanopillars for tribological experiments

Published 2015 View Full Article

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Title
Fabrication of high-aspect ratio silicon nanopillars for tribological experiments
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 14, Issue 4, Pages 044506
Publisher
SPIE-Intl Soc Optical Eng
Online
2015-12-11
DOI
10.1117/1.jmm.14.4.044506

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