Fabrication of high-aspect ratio silicon nanopillars for tribological experiments

标题
Fabrication of high-aspect ratio silicon nanopillars for tribological experiments
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 14, Issue 4, Pages 044506
出版商
SPIE-Intl Soc Optical Eng
发表日期
2015-12-11
DOI
10.1117/1.jmm.14.4.044506

向作者/读者发起求助以获取更多资源

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started