Electrical properties of sulfur-implanted cubic boron nitride thin films

Title
Electrical properties of sulfur-implanted cubic boron nitride thin films
Authors
Keywords
Cubic boron nitride, Ion implantation, Doping, Electrical properties
Journal
CHINESE SCIENCE BULLETIN
Volume 59, Issue 12, Pages 1280-1284
Publisher
Springer Nature
Online
2014-01-28
DOI
10.1007/s11434-014-0136-6

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