Electrical transport properties of the Si-doped cubic boron nitride thin films prepared by in situ cosputtering

Title
Electrical transport properties of the Si-doped cubic boron nitride thin films prepared by in situ cosputtering
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 2, Pages 023716
Publisher
AIP Publishing
Online
2011-01-21
DOI
10.1063/1.3544065

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