Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing
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Title
Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing
Authors
Keywords
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Journal
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 7-8-9, Pages 243-250
Publisher
Wiley
Online
2014-08-20
DOI
10.1002/cvde.201407118
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