Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas

Title
Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 118, Issue 12, Pages 123302
Publisher
AIP Publishing
Online
2015-09-24
DOI
10.1063/1.4931370

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