Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
出版年份 2015 全文链接
标题
Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
作者
关键词
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出版物
JOURNAL OF APPLIED PHYSICS
Volume 118, Issue 12, Pages 123302
出版商
AIP Publishing
发表日期
2015-09-24
DOI
10.1063/1.4931370
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