Low defect InGaAs quantum well selectively grown by metal organic chemical vapor deposition on Si(100) 300 mm wafers for next generation non planar devices

Title
Low defect InGaAs quantum well selectively grown by metal organic chemical vapor deposition on Si(100) 300 mm wafers for next generation non planar devices
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 26, Pages 262103
Publisher
AIP Publishing
Online
2014-07-08
DOI
10.1063/1.4886404

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