Quasi-reversible point defect relaxation in amorphous In-Ga-Zn-O thin films by in situ electrical measurements

Title
Quasi-reversible point defect relaxation in amorphous In-Ga-Zn-O thin films by in situ electrical measurements
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 12, Pages 122103
Publisher
AIP Publishing
Online
2013-03-26
DOI
10.1063/1.4796119

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