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Title
Nitrogen passivation at GaAs:Al2O3 interfaces
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 9, Pages 091606
Publisher
AIP Publishing
Online
2013-03-09
DOI
10.1063/1.4794898
References
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Related references
Note: Only part of the references are listed.- Reduction in interface state density of Al2O3/InGaAs metal-oxide-semiconductor interfaces by InGaAs surface nitridation
- (2012) Takuya Hoshii et al. JOURNAL OF APPLIED PHYSICS
- Defect states at III-V semiconductor oxide interfaces
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- Interfacial chemistry of oxides on InxGa(1−x)As and implications for MOSFET applications
- (2011) C.L. Hinkle et al. CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE
- Si passivation effects on atomic bonding and electronic properties at HfO2/GaAs interface: A first-principles study
- (2011) Weichao Wang et al. JOURNAL OF APPLIED PHYSICS
- Is interfacial chemistry correlated to gap states for high-k/III–V interfaces?
- (2011) W. Wang et al. MICROELECTRONIC ENGINEERING
- Atomic Layer Deposition of Dielectrics on Ge and III–V Materials for Ultrahigh Performance Transistors
- (2011) Robert M. Wallace et al. MRS BULLETIN
- Impact of InGaAs surface nitridation on interface properties of InGaAs metal-oxide-semiconductor capacitors using electron cyclotron resonance plasma sputtering SiO2
- (2010) T. Hoshii et al. APPLIED PHYSICS LETTERS
- Fabrication and characterization of metal-insulator-semiconductor structures by direct nitridation of InP surfaces
- (2010) T. Haimoto et al. APPLIED PHYSICS LETTERS
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- (2009) John Robertson APPLIED PHYSICS LETTERS
- S passivation of GaAs and band bending reduction upon atomic layer deposition of HfO2/Al2O3 nanolaminates
- (2008) F. S. Aguirre-Tostado et al. APPLIED PHYSICS LETTERS
- Band offsets of atomic-layer-deposited Al2O3 on GaAs and the effects of surface treatment
- (2008) N. V. Nguyen et al. APPLIED PHYSICS LETTERS
- Performance enhancement of n-channel inversion type InxGa1−xAs metal-oxide-semiconductor field effect transistor using ex situ deposited thin amorphous silicon layer
- (2008) A. M. Sonnet et al. APPLIED PHYSICS LETTERS
- High-Performance Inversion-Type Enhancement-Mode InGaAs MOSFET With Maximum Drain Current Exceeding 1 A/mm
- (2008) Y. Xuan et al. IEEE ELECTRON DEVICE LETTERS
- Carrier-Transport-Enhanced Channel CMOS for Improved Power Consumption and Performance
- (2008) Shinichi Takagi et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Main determinants for III–V metal-oxide-semiconductor field-effect transistors (invited)
- (2008) Peide D. Ye JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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