Electrical characteristics of hydrogen-terminated diamond metal-oxide-semiconductor with atomic layer deposited HfO2 as gate dielectric

Title
Electrical characteristics of hydrogen-terminated diamond metal-oxide-semiconductor with atomic layer deposited HfO2 as gate dielectric
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 11, Pages 112910
Publisher
AIP Publishing
Online
2013-03-22
DOI
10.1063/1.4798289

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