Fabrication of Metal–Oxide–Diamond Field-Effect Transistors with Submicron-Sized Gate Length on Boron-Doped (111) H-Terminated Surfaces Using Electron Beam Evaporated SiO2 and Al2O3

Title
Fabrication of Metal–Oxide–Diamond Field-Effect Transistors with Submicron-Sized Gate Length on Boron-Doped (111) H-Terminated Surfaces Using Electron Beam Evaporated SiO2 and Al2O3
Authors
Keywords
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Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 40, Issue 3, Pages 247-252
Publisher
Springer Nature
Online
2011-02-02
DOI
10.1007/s11664-010-1500-1

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