Towards secondary ion mass spectrometry on the helium ion microscope: An experimental and simulation based feasibility study with He+ and Ne+ bombardment

The Prospects of a Subnanometer Focused Neon Ion Beam

(2011) F. H. M. Rahman et al.   SCANNING

New neutral cesium evaporation chamber and UHV suitcase

(2010) B. Bendler et al.   SURFACE AND INTERFACE ANALYSIS

Study of Ni2–Mn–Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO3∕Pb(Ti,Zr)O3 buffer

(2009) F. Figueiras et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

On the influence of the sputtering in determining the resolution of a scanning ion microscope

(2009) V. Castaldo et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding imaging modes in the helium ion microscope

(2009) Larry Scipioni et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

(2009) Richard Livengood et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

A model of secondary electron imaging in the helium ion scanning microscope

(2009) Ranjan Ramachandra et al.   ULTRAMICROSCOPY

Formation of atomic secondary ions in sputtering

(2008) A. Wucher   APPLIED SURFACE SCIENCE

Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

(2008) David Cohen-Tanugi et al.   JOURNAL OF APPLIED PHYSICS