Journal
NANOSCIENCE AND NANOTECHNOLOGY LETTERS
Volume 3, Issue 2, Pages 230-234Publisher
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/nnl.2011.1160
Keywords
MEMS; Flow Sensor; Silicon Nanowire
Funding
- A-STAR [09214 80069]
- University Research Committee [R-263-000-475-112]
- National University of Singapore [MOE2009-T2-2-011]
Ask authors/readers for more resources
Cantilever structures were reported to be used for flow sensing purposes. Herein, we present silicon nanowire (SiNW) based cantilever flow sensor. Five cantilever flow sensors with different depths are modeled and simulated (fluid-structure) with water flow velocity from 50 cm/s to 200 cm/s. SiNW is embedded in the cantilever as piezoresistive transducer at the anchor, and a maximum resistance change of 11.2% is obtained. Based on the results, increasing depth will not only contributes to larger cantilever deformation at fixed flow velocity, but also improves its sensitivity. However when the depth become larger to certain degree, this effect tends to saturate.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available