Interfacial layer growth condition dependent carrier transport mechanisms in HfO2/SiO2 gate stacks

Published 2012 View Full Article

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Title
Interfacial layer growth condition dependent carrier transport mechanisms in HfO2/SiO2 gate stacks
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 23, Pages 232903
Publisher
AIP Publishing
Online
2012-06-08
DOI
10.1063/1.4726186
References
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