Grain boundary assisted degradation and breakdown study in cerium oxide gate dielectric using scanning tunneling microscopy

Title
Grain boundary assisted degradation and breakdown study in cerium oxide gate dielectric using scanning tunneling microscopy
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 7, Pages 072902
Publisher
AIP Publishing
Online
2011-02-15
DOI
10.1063/1.3553190

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