Formation of high density tungsten nanodots embedded in silicon nitride for nonvolatile memory application

Published 2009 View Full Article

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Title
Formation of high density tungsten nanodots embedded in silicon nitride for nonvolatile memory application
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 6, Pages 063108
Publisher
AIP Publishing
Online
2009-02-12
DOI
10.1063/1.3081042
References
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