Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing

标题
Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 17, Pages 172111
出版商
AIP Publishing
发表日期
2008-11-09
DOI
10.1063/1.3000604

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