Mapping of local argon impingement on a virtual surface: an insight for gas injection during FEBID

The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

(2014) Robert Winkler et al.   ACS Applied Materials & Interfaces

Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator

(2014) A V Riazanova et al.   NANOTECHNOLOGY

Absolute cross sections for dissociative electron attachment and dissociative ionization of cobalt tricarbonyl nitrosyl in the energy range from 0 eV to 140 eV

(2013) Sarah Engmann et al.   JOURNAL OF CHEMICAL PHYSICS

Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition

(2012) Marco Gavagnin et al.   ACS Nano

Nanosynthesis of Tunable Composite Materials by Room-Temperature Pulsed Focused Electron Beam Induced Chemical Vapour Deposition

(2011) M. S. Gabureac et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: simulation and experiment

(2009) V Friedli et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron Beam Induced Deposition and Etching: Fundamentals, Challenges and Nanotechnology–based Applications

(2009) J Fowlkes et al.   MICROSCOPY AND MICROANALYSIS

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Electron beam induced deposition of iron nanostructures

(2008) G. Hochleitner et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material

(2008) Daryl A. Smith et al.   Small