Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser

Title
Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser
Authors
Keywords
Pulse Energy, High Repetition Rate, Deep Hole, Heat Accumulation, Hole Depth
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 114, Issue 1, Pages 91-111
Publisher
Springer Nature
Online
2013-11-23
DOI
10.1007/s00339-013-8155-8

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