Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining
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Title
Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining
Authors
Keywords
Femtosecond Laser, Microfluidic Channel, Porous Glass, Femtosecond Laser Ablation, High Etching Rate
Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 114, Issue 1, Pages 215-221
Publisher
Springer Nature
Online
2013-11-13
DOI
10.1007/s00339-013-8107-3
References
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