Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration
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Title
Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration
Authors
Keywords
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Journal
LAB ON A CHIP
Volume 13, Issue 8, Pages 1626
Publisher
Royal Society of Chemistry (RSC)
Online
2013-02-06
DOI
10.1039/c3lc41171k
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