Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition
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Title
Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition
Authors
Keywords
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Journal
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2018-07-26
DOI
10.1002/anie.201806985
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Related references
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