High reliability nanosandwiched Pt/Ti multilayer electrode actuators for on-chip biomedical applications

Title
High reliability nanosandwiched Pt/Ti multilayer electrode actuators for on-chip biomedical applications
Authors
Keywords
-
Journal
ANALYST
Volume 139, Issue 2, Pages 407-415
Publisher
Royal Society of Chemistry (RSC)
Online
2013-11-04
DOI
10.1039/c3an01363d

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