A biocompatible Parylene thermal flow sensing array

Title
A biocompatible Parylene thermal flow sensing array
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 144, Issue 1, Pages 18-28
Publisher
Elsevier BV
Online
2008-02-20
DOI
10.1016/j.sna.2007.12.010

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