High-Efficiency MEMS Electrochemical Actuators and Electrochemical Impedance Spectroscopy Characterization

Published 2012 View Full Article

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Title
High-Efficiency MEMS Electrochemical Actuators and Electrochemical Impedance Spectroscopy Characterization
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 5, Pages 1197-1208
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-07-11
DOI
10.1109/jmems.2012.2203103

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