Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon
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Title
Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 23, Issue 36, Pages 4174-4177
Publisher
Wiley
Online
2011-08-08
DOI
10.1002/adma.201101888
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